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Product List2012.6.19

-This is the list of our main products.-
We offer customizable products. We can change the type and thickness of the wafer film based on your demand. Should you have any requests, please contact us.

Bare Si wafer(75mm,100mm,150mm,200mm,300mm,450mm)

●Various Blanket wafer (available for 200mm /300mm Wafer)
– Cu, Ta/ TaN, W, Ti/ TiN, Al-Cu, SiN, PE-TEOS, HDP, HARP oxide, Poly-Si, Th-Ox, ACL, SiC, SiON, Photo resist, Polyimide
– Low-k, ULK, High-k
– precious metals- Ru, Co, CoEP, Pt, Au

●Various Patterned wafer (available for 200mm /300mm Wafer)
– MIT 854/754 Pattern Wafer (W, Cu, Al))
– MIT 864/764 STI Pattern, ILD Pattern Wafer
– AMT STI Pattern Wafer (min.0.18um LS)
– 3D Pattern wafer
– KrF, ArF Litho, Immersion litho and Etched wafer
– High-dose Implanted Wafer
-TSV test wafer, low-temperature TEOS, low-temperature SiN Wafer

fine-patterned trench, hole wafer

Glass Wafer

We offer measurement services of Si wafers.